Single Zone 1200°C Split Tube furnace
| • Max 1200ºC, and for 1100ºC continuous heating- • Programmable precision digital temperature controllers with 30 segments.
- • Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm
- • Input power: 208 – 240V AC input, single phase at max. 7KW.
- • Vacuum sealed flanges are included for immediate use.
- • Optional: three-zone furnace with 24" heating zone can be replaced at extra cost
( click Pic 2 to review specs )
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Plasma RF Power Supply
| • Output Power: 5 -300W adjustable with ± 1% stability- • RF frequency: 13.56 MHz ±0.005% stability
- • Reflection Power: 200W max.
- • Matching: Automatic
- • RF Output Port: 50 Ω, N-type, female
- • Noise: <50 dB.
- • Cooling: Air cooling.
- • Power: 208-240VAC, 50/60Hz
- • Note: This RF power supply can accept 50 - 80 mm Max. quartz tube
by changing flange
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Pressing Tube
| • Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included. Click Pic 1 to order spare- • 5" SS vacuum flange with valve and K25Vacuum port is included
- • One Anti-corrosive Pressure Gauge is installed on the flange
- º 3.8x10-5 to 1125 Torr measurement range
- º Anti-corrosive, gas-type independent
- º High accuracy and reproducibility at atmosphere for reliable atmospheric pressure
detection - º Fast atmospheric detection eliminates waiting time and shortens process cycle
- º We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge
which is sufficient for 30-40 hrs battery life per charge.
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Vacuum Pump and valve
| • EQ-FYP-Pump is installed inside the heavy-duty mobile cart.- • One Cold Trap for Recovering Condensables is included
- • KF25 adapter and stainless steel pipe are connected between the pump and tube flange with
precision ball valve for user's plug and immediately use. - • 10E-2 Torr vacuum can be achieved inside the processing tube
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Temperature Controller
| • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.- • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- • Over-temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- º Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers) + 15"
laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- º You may upgrade the temperature controller to the Eurotherm 3504 Temperature
Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
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Optionals |
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Dimensions
| • Furnace: 1100 X 450 x 670 mm- • Net weight: 220 lbs
- • Shipping weight: 350 lbs
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Warranty
| One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
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Laptop, software & WiFi Control (Optional)
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Compliance | • CE Certified- • All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing
system, vacuum system, and plasma generator - • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
( please click marks below to learn details )
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Operation Instruction
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Warning
Click here to learn the installation of a gas regulator
| • An operator should Keep safe distance >1 meter away from the Plasma Generator & its furnace chamber when the plasma is activated. The operator shall wear RF protective garments when continues operation at a close distance (< 1 meter) with the plasma is required. - • It is highly recommended to shield the furnace in an RF protective fume hood. We recommend
you prepare an RF Detector to monitor RF power all the time.
- • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2
bars / 3 psi / 0.02 MPa - • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
used up to 1000°C - • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
shocks to the tube - • MTI reserves right to modify PECVD design at any time without notice but promise that quality
will meet the specifications above
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Shipping Dimensions | • Pallet #1: 48" x 40" x 60", Pallet #2: 48" x 40" x 40", Pallet #3: 48" x 40" x 40", Pallet #4: 48" x 40" x 40"
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Total Shipping Weight | 500 kg (1100 lbs) |