Furnace
| structure
| Compact 4“ RTP Tube Furnace(Double layer steel case mullite liner)
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Heating element
| 8 pcs Halogen light tube (D=10 L=300 T =200, mm)
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Working Temp.
| 1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
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Max heating rate | 50° C/sec |
Max cooling rate | 64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)
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Heating zone
| 12" length with 4" constant temperature zone within +/-1°C uniformity
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Program Temp. Controller
| • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- • 30 programmable segments for precise control of heating rate, cooling rate
and dwell time.
- • Please click here to learn why SCR is more accurate than SSC (Solid state
relay).
- • Built in PID Auto-Tune function with overheating & broken thermocouple
broken protection.
- • Over temperature protection and alarm allows for operation without
attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • PC Control:
- º A MTS-02 control module is included for PC control on this furnace.
- º The new version of PC module is now compatible with Lab View
05/08/2014
- º A laptop PC can be ordered for $900 together with the furnace. We
recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
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Quartz Tube & Sample Holder
| • Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
- • 3" diameter Sample holder is inserted to sliding flange, which is made of
quartz
- • One 3" diameter AlN wafer is placed in the center of holder for annealing
sample up to 3" dia.
- • AlN has very high thermal conductivity, which provides the best temperature
uniformity in the sample area
- • The sample holder is removable from flange
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Vacuum flange
| KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves. Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
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Water Cooling Jacket
| • Cooling water is required.
- • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp.
< 25ºC; pressure > 25 PSI.
- • We suggest using the EQ-KJ5000 Series recirculating water chiller as a
cooling system (please order separately at related products below) to save water.
Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.
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Flow meter
| One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
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Power input
| 208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
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HV Station High Vacuum Station
| Structure
| • Mobile cart size: 600 (L) x 600 (W) x 700(W), mm
- • Max. Loading: 600 Lbs on top
- • Molecular pump control Panel : LCD digital
- • Diaphragm Pump and Turbo Molecular Pump are installed inside the steel
case.
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Vacuum Degree
| 6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
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Control panel
| • One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
- • System controlled spining speed - the controller will control the speed of
the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
- • Self protection - the system will protect the pump from damage by
overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum.
- • LCD screen - double lines parameters checking interface make the working
easier to be handled.
| | Self testing
| Spinning up
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Start-up time
| 2 minutes
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Backing Pump Volume Flow Rate at 10 mbar
| 3.8 L/min for 50Hz and 4.4 L/min for 60Hz
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Power input
| 110V AC or 220V AC switchable, 50/60Hz
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Power consumption
| Duration/Max power: 100/110Watt
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Shipping Info
| Weight and Dimension
| RTP furnace: 110 lbs, 760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H HV station: 40 lbs, 600 x 600 x 700mm (24" x 24" x 28") L x W x H
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Warranty | One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
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Laptop, software & WiFi Control (Optional) | |
Compliance | • CE Certified
- • The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost.
Please contact us for quote and detail information.
- • Temperature controller is MET and CE Certified
- • High Vacuum Station is TUV Certified
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Application Notes
Click here to learn the installation of a gas regulator
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to
below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the
tube
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Operation Instructions | |